可交联聚甲基丙烯酸甲酯的合成、表征及在阵列式波导光栅中的应用

Synthesis and Charaterization of Crosslinkable Poly(MMA-co-GMA) and Its Application in Arrayed Waveguide Grating

合成了含环氧基团的可交联的甲基丙烯酸甲酯和甲基丙烯酸环氧丙酯的共聚物[Poly(MMAcoGMA)],通过FTIR,NMR,GPC,DSC和AFM等技术对其进行了表征.结果表明,所合成的聚合物材料具有较好的成膜性;通过热固化使引入的环氧基团开环交联,该聚合物的玻璃化转变温度(Tg)比固化前提高了24K,同时有效地降低了聚合物的双折射率.用Poly(MMAcoGMA)作为包层材料,双酚A型环氧化合物作为高折射率材料,将其引入到包层材料中形成芯层材料的折射率在波长1.55μm处可调,其范围是1.483～1.588.采用旋涂、铝掩膜和氧反应离子刻蚀的方法(RIE)制得了阵列式光波导.测试结果表明,制作的波导在1.55μm处实现了光的单模传输,光损小于3.0dB/cm.

A novel crosslinkable poly（ methyl methacrylate-co-glycidyl methacrylate） synthesized and was determined by FTIR,^1 H NMR, GPC, DSC and AFM. The polymers have an excellent film-forming capability and possess a high glass transition temperature after crosslinking. The refractive index of the polymer can be adjusted between 1. 483 and 1. 588 at 1.55μm by doping bisphenol A epoxy. Because of three-dimensionally crosslinked structure, the birefringence of the polymers was very low. The arrayed waveguide grating, poly （MMA-co-GMA） acting as cladding and poly（MMA-co-GMA） doped bisphenol A epoxy acting as core layer, was fabricated by spin coating, using aluminum as mask and oxygen reactive ion etching. And its optical properties were characterized. The waveguide achived single-mode transmission and optical loss of the core layer was less than 3.0 dB/cm at 1.55 μm.