摘要
文章详细介绍了数字微镜系统总体设计,并进行了实验验证。数字微镜如果结合高质量的高倍精缩投影光学系统,完全可实现亚微米级衍射微光学元件的制作。最后对系统特点和系统误差进行了总结。
The overall design of Digital micromirror device （DMD）. system is given detailedly, and experimental verifying is also carried out. If it is combined with high quality reduction projecting system, the fabrication of sub-micron diffractive optical elements can be realized completely. In the end, system characteristic and system error are summarized.
出处
《激光与红外》
CAS
CSCD
北大核心
2006年第3期206-209,共4页
Laser & Infrared
关键词
数字微镜
灰度掩模
系统设计
系统特点
系统误差
digital micromirror
gray-scale level mask
system design
system characteristic
system error
