洁净区高效过滤器检漏测试

Testing about the Leakage of HAPE Filter in Classification Area

目的:准确检测高效过滤器的质量,以避免高效过滤器泄漏,影响生产。方法:用尘埃粒子计数器检测高效过滤器是否有泄漏现象。结果:检测各点的悬浮粒子若超出洁净区要求的范围则有泄漏现象,需堵漏或更换。结论:本法操作简便、准确。

Objective： accurately analysis the quality of HAPE filter to avoid the leakage of filter which can effect the normal production. Methods： we can use the particles accounter to test the leakage of HAPE filter. Results： if particles of each testing point is over the acale and requirement of classification area, it sbows that the HAPE filter have been leaked and we need to change a new one. Conclusion： This method is simple, rapid and accurate.