先进云纹测量技术及应用

Advanced moire techniques and its application

本文着重介绍了高灵敏度云纹法的发展及其在结构和材料力学行为测量方面的应用,包括云纹干涉法、微米云纹法、纳米云纹法及其相移技术。介绍了清华大学工程力学系光测实验室近年来利用云纹干涉法在材料科学、激光焊接、微电子封装等力学行为测量方面的应用成果。讨论了微米/纳米云纹法分别在微电子封装、微机械系统(MEMS)、纳观变形场测量中的应用。

In this paper, high sensitivity moire methods and their application to the deformation measurement of the structure and behavior analysis of the materials are introduced. Some experimental results on materials characterization, laser weldment, electronic packaging with moire interferometry are discussed. In addition, some recent research results on electronic packaging, MEMS, nano-deformation using micro/nano-moire method are also given.