摘要
本文介绍了一种可见光激光器端面镜面保护方法。用电子束蒸发在可见光激光器的两个镜面上分别镀上0.75 λ/2和λ/2厚的 Al_2O_3钝化膜,并就镀膜对激光器性能的影响进行了测试研究。经过镜面保护的可见光激光器寿命有很大改善,且由于一个端面镀上0.75 λ/2抗反射膜,使激光器的极限输出功率有一定的提高。
A method of mirror face protection for(AlGa)As visible laser is presented.The Al_2O_3 passivation thin films with the thickness of 0.75(λ/2)and(λ/2) respectively are coated on the two mirror faces of the visible laser by electron beam vapourization.The effect of the coating films on laser performances is analysed. With the mirror face protection,the lifetime of the visible laser is considerably impro- ved and the limit output power of the laser is reasonably increased as one end has been coated with an anti-reflection thin film of 0.75(λ/2).
出处
《半导体光电》
CAS
CSCD
北大核心
1990年第2期138-141,共4页
Semiconductor Optoelectronics
