CdTe衬底中微细孪晶对Hgl-xCdxTe液相外延层的影响

Effect of the Fine Twin Crystals in CdTe Substrates on Hgl-xCdxTe LPE Layers

本文首次报导了作为 Hg_(1-x)Cd_xTe 液相外延衬底的 CdTe 晶片中存在着狭窄的微细孪晶,其宽度由数十微米到数微米。这些微细孪晶在液相外延过程中将向Hg_(1-x)Cd)_xTe 外延层延伸,形成相应的 Hg_(1-x)Cd_xTe 微细孪晶,从而导致外延层表面出现细长的直线线痕,程度不同地破坏了 Hg_(1-x)Cd_xTe 液相外延层表面的平整性和光洁度。

The article reports for the first time that there exist naow fine twin crystals in CdTe wafer which is used as substrate for LPE growth of Hg_(1-x)Cd_Te. The width of these twin crystals are from tens to a few microns.They will extend to Hg_(1-x)Cd_Te epitaxial layers in the process of LPE and form corresponding finer Hg_(1-x)Cd_Te twin crystals,so that the slender straight line marks appear on the sur- face of the epitaxial layers.As a result the smoothness and the finish of the surface of the Hg_(1-x)Cd_Tc LPE layers will be destroyed to a certain degree.