摘要
水平式隧穿磁强计是一种新型隧穿磁强计,其特点是:反映磁场变化的Loren tz力与敏感元件在同一水平面内。对已加工的这种磁强计表头进行了性能实验。实验内容包括:通过隧道电流和驱动电压的测试实验来验证该表头是一种符合隧道效应的传感器;通过隧道电流和线圈电流的测试实验来验证该表头具有磁强计的基本功能。测试结果表明:这种磁强计符合隧道效应并能够敏感磁场信号。
A horizontal tunneling magnetometer was developed in which the Lorentz force is in the same plane as the sensitive element of the magnetometer. The functional tests were introduced and analyzed. The relationship between the tunneling current and the drive voltage was tested to prove that the magnetometer is a tunneling sensor. The relationship between current and the coil current wa~ tested to demonstrate that the magnetometer has the basic function of a magnetometer, The testing results showed that the magnetometer conforms to the tunneling effect and is sensitive to the magnetic field.
出处
《清华大学学报(自然科学版)》
EI
CAS
CSCD
北大核心
2006年第2期203-205,共3页
Journal of Tsinghua University(Science and Technology)
关键词
传感器
隧穿效应
磁强计
微机电系统
sensor
tunnel effect
magnetometer
microelectromechanical systems (MEMS)