基于振动模型的精密工作台运动控制

Precision stage motion controller based on a vibration model

精密工作台高加减速的运动反力作用于机台上,会引起机台机械共振,使轨迹跟踪精度降低、定位建立时间加长,针对这一问题,提出了基于精密工作台振动模型,采用极点配置、模型参数匹配的方法设计P ID控制器。通过实验,与PD+加速度前馈的控制方式相比较,当工作台以120mm/s、1 g的加减速运动时工作台轨迹跟踪精度提高了2μm,定位建立时间缩短了10m s。结果表明,采用基于振动模型设计的P ID运动控制具有较好的动态响应和轨迹跟踪性能。

High acceleration movements of a precision stage result in reaction forces that lead to mechanical resonance in the stage, which reduces the tracking accuracy and lengthens the positioning time. A simple controller architecture was developed to reduce the mechanical resonance based Qn a vibration model of the stage with the pole assignment and the model parameter matching methods used to design a PID controller. Tests showed that the tracking accuracy of the controller was 2 μm better than a normal PID controller with acceleration feedforward control at a uniform speed of 200 mm/s and at an acceleration of 1 g, while the positioning time was reduced by 10 ms. The results show that the vibration model-based PID motion controller has much better dynamic response and tracking performance.