GaAs超高速集成电路

GaAs Very High Speed IC

本文简要地评述了GaAs VHSIC的特点和发展概况。叙述了GaAs高速器件、基本的逻辑结构和一些重要的制连技术。并对一些新型高速器件、重要的工艺技术和发展前景进行了讨论。

This paper briefly reviews features and development of GaAs very high speed IC(GaAs VHIC). GaAs VHIC, fundamental logic circuit configuration and some important fabrication technology are described. Advanced high speed devices, navel Process techniques and future trends of GaAs VHSIC are also discussed.