微型靶标的半自动装配系统设计

Design of Semiautomatic Assembly System on Micro-sphere Target

设计了微型靶标半自动装配系统的机械结构和微动机构,装配系统采用真空吸头固定微型靶标的半圆柱和靶球,采用步进电机控制精密丝杠带动平移台进行粗调与压电陶瓷微机械臂进行微调相结合的方式进行精密定位,并用CCD在线监测装配过程中靶标各部件的相对位置。实验证明系统的装配精度为2μm。

The paper designed the mechanical structure and micro--actuator of a semiautomatic assembly system on micro--sphere target. The half cylinders and micro--sphere were fixed by vacuum absorber, locomotive table driven by step motor and piezoelectric micro--mechanical arm were used for precise localization, and CCD was adopted to monitor the position of parts of micro--target. The experiments show the assembly error is only 2μm.