摘要
金属有机化学汽相淀积(MOCVD)通常被认为是一个非平衡过程。然而在生长速度的扩散控制区,可以假定在汽-固界面存在平衡。本文用平衡模型计算了用二甲基锌(DMZ)或二乙基锌(DEZ)与硫化氢和硒化氢为源,生长ZnS_xSe_(1-x)三元合金时,各反应参数对固溶体组分的影响。本模型考虑了汽相中H_2S和H_2Se的热分解,固溶体的非理想行为,计算了生长温度、压力、输入反应室的、[Ⅵ/Ⅱ]比和初始氢含量对固溶体成分的影响,并把计算值与实验结果进行了比较。
A equilibrium model is proposed to compute the relationship between vapor and solio compositionof ZnS_xSe_(1-x)grown by DMZ (or DEZ) H_2S and H_2Se.The decomposition of H_2Sand H_2Se and nonideal behavior of solid solution are taken into account. The influence of thegrowth temperature, reactor pressure, [Ⅵ]/[Ⅱ]ratio,initial partial pressure of H_2 and inputcompasition Ⅵ group reactants on the compositions of the solid solutions had been calculated.
关键词
Ⅱ-Ⅵ族化合物
MOCVD
固溶体
ZnS_xSe_(1-x)MOVPE
Thermodynamics
Solid-vapor distribution coefficient
