摘要
介绍集成电路生产中产生各种废气的种类,废气中有害物质浓度及其危害性,并依据工程实践,评述了各类有害废气的各种处理方法。
Introduces the composition, concentration and risk of waste gas generated during IC poduction, The methods of waste gas treatment are evaluated based on practical projects.
出处
《洁净与空调技术》
2006年第1期19-22,共4页
Contamination Control & Air-Conditioning Technology
