超精密无偏转弹性变形微位移机构设计

ULTRAPRECISION MICRO-DISPLACEMENT MECHANISMWITHOUT DEFLECTION BASED ONELASTIC-DEFORMATION

在普通横向弹性变形微位移机构基础上，通过另一弹性杆改变了为产生微位移所加力的方式，改变了位移输入和输出点的位置，保证了微位移输出点无偏转，提高了刚度，减小了相间干扰。采用的施力方式有固定铰支座型和固定端型两种，其中固定端型效果较好。这两种机构与其他驱动系统配合，可以达到超精密的分辨率和精度。

Based on an ordinary elastic-deformation micro-displacement mechanism,force acting mode for producing micro-displacement is changed through an elastic rod,and the position of displacement input and output are changed, which guarantees dis-placement output against deflection, increases system stiffness and reduces mutual int-erference. There are two force acting modes i. e. fixed hinged end mode and fixed endmode. Among them the fixed end performance is better. If they are combined with otkerdriving system, the ultraprecision resolution and accuracy can be obtained.