脉冲激光沉积工艺参数对生物活性薄膜的影响

Effects of experimental parameters on the pulsed laser deposited bioactive thin films

脉冲激光沉积是近年来出现的一项制备薄膜的新技术,在制备生物活性薄膜方面显示出独特的优越性。介绍了脉冲激光沉积技术的原理及特点,详细综述了反应气氛、衬底温度、激光波长、能量密度、靶材性能、沉积速率及薄膜厚度等工艺参数对羟基磷灰石及生物玻璃薄膜组织及性能的影响,展望了该项技术的应用前景。

Pulsed laser deposition （PLD） is a new technique for producing thin film in the recent years. It shows the unique advantages for the deposition of bioactive thin films. The mechanism and characteristics of the pulsed laser deposition technique are introduced. Effects of various parameters of the PLD process on the structures and the properties of the HA and bioglass thin films, including atmosphere, substrate temperature, laser wavelength, energetic density, target properties, deposition rate and thickness of the films are reviewed respectively in detail. The future application trend is also prospected.