摘要
用ＧｅｘＳｉ１－ｘ／Ｓｉ亚稳材料在高温下制作了光波导，它的传输损耗为０．８ｄＢ／ｃｍ，比低温工艺的０．５ｄＢ／ｃｍ稍大。并发现ＧｅｘＳｉ１－ｘ／Ｓｉ材料的大量失配位错和一些有趣的现象。
The GexSi1-x/Si optical waveguides were fabricated after high temperature processing.It is found that the GexSi1-x/Si crystal has a lot of dislocation defects and some interesting phenomena.propagation losses of the waveguides is about 0.8 dB/cm.Which is higher than one of the waveguides by low temperature processing.
出处
《固体电子学研究与进展》
CAS
CSCD
北大核心
1996年第1期34-37,共4页
Research & Progress of SSE
基金
国家自然科学基金
关键词
位错
光波导
硅化锗
GeSi Dislocation Optical Waveguides
