非晶硅集成型色敏元件及其传感器

Amorphous silicon integrated type color sensor

研究一种新型的非晶硅ＰＩＮ异质结集成型色敏元件及其传感器的制备工艺和结构，详细讨论了色敏元件的优化设计以及响应特性、暗电流等性能。实验结果表明，采用ａ－ＳｉＣ／ａ－ＳｉＰＩＮ异质结构和分离反应室的ＰＥＣＶＤ工艺，使色敏元件的灵敏度和暗电流特性得到了明显的改善。利用这种色敏元件及其传感器可以实现高精度的颜色识别。

In this paper,the amorphous silicon integrated type color sensor is investigated.The preparation and structure of this new film color sensor are given.The optimum design and characteristics, such as spectral response and dark current etc.are discussed. Experimental results show that the properties of the color sensor are substantially improved by the a -SiC/a-Si PIN heterojunction and separated reaction chamber method.The high accurate color recognition is realized using this integrated type color sensor.