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用全息三波面干涉法产生透镜阵列

Lens Arrays Made with the Holographic Three Wavefront Interferometry
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摘要 采用三次曝光在全息图上依次记录下三个两两波法线夹角相等的平面波。然后用原参考光照射处理后的全息图,同时再现出三个平面波,得到三光束干涉的六角形蜂窝状阵列式空间光强分布。用正性光刻胶板记录下此光强分布,经显影、电铸等工艺步骤制成镍母板。用镍母板在透明塑料上热压成型得到透镜阵列板。 Three plane waves with three equal angles formed by each two wave normal lines are recorded on hologram by three exposures.The hologram is illuminated with the original reference light,then spatial light intensity distribution of hexagonal honeycomb array produced by three ligh beams are obtained.The light intensity distribution is recorded by the positive photoresist plate.The developed photoresist plate is used to replicate a nickel plate by electro forming.Lens arrays are obtained by impressing the nickel master onto an embossing plastic plate.This method is suitable for making lens arrays with the lens diameters ranging from ten micrometer to several millimeters.
作者 王丁 陈文涛
出处 《光电工程》 EI CAS CSCD 1996年第2期28-33,共6页 Opto-Electronic Engineering
基金 重庆市科委基金支持项目
关键词 光学零件加工 微型透镜 全息干涉术 Optical element processing,Electrotyping,Microlenses,Holographic interferometry.
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参考文献1

  • 1Ming Hai,Applied Optics,1990年,29卷,34期,5111页

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