纳米定位控制中消除PZT滞后及蠕变的方法

Ways to Eliminate Hysteresis and Creep in Nano-positioning

总结了近年来用ＰＺＴ致动器进行纳米线性定位控制的方法，对其特点和局限性进行了分析，并提出了一种可望在较大行程范围内获得亚纳米定位分辨率的方法。

PZT actuator controlled by applied voltage has some undesirsble characterestics,such as hysteresis and creep.Hysteresis degrades the repeatability and creep downs the response to sudden change of voltage in ultra-precision positioning.A number of methods to reduce the nonlinearity were summarized and their limitations were analyzed in this paper.A better positioning system which can achieve nano-resolution, 10 nm position accuracy and good linearity was proposed.In this system,both amplifying and reducing mechanisms were used tO enhance the sensor sensitivity and the position resolution f the PZT actuator was controlled by applied voltage and the error is detected by a capacitance micrometry.