摘要
本文采用时间分辨质谱法研究了355nm激光烧蚀氯化铜的动力学.由四极质谱测得各生成产物离子的飞行时间(TOF)谱可用不同形式的Maxwell速度分布公式拟合,由获得主要的烧蚀中性产物为CuCl,CuCl_2,Cu_3Cl_3和Cu_4Cl_2.当激光能量密度增加时,不同产物相对产率的变化并不相同,表明各产物的生成机理存在差异.此外,还对紫外激光烧蚀机理进行了探讨.
The kinetics of laser ablation of cupric chloride at 355nm has been investigated by time-resolved mass spectrometric method. The measured time-of-flight (TOF) spectra for both neutral and ionic products, such as CuCl,CuCl2,Cu3Cl3,Cu4Cl4 and Cu+, can be fitted by different typies of Maxwell-Boltzmann distributions. The dependence of the relative yield of ablation products on laser fluence is not the same for the different kinds of products. This result implies that the process for the CuCl and CuCl2 formation is different from that of Cu3Cl3 and Cu4Cl4. The proposed mechanism for UV laser ablation of cupric chloride involves the laserinduced plasma heating, the evaporation and decomposition of CuCl2, target as well as the collisional congelation of the CuCl species to generate the clusters of Cu3Cl3 and Cu4Cl4.
基金
国家自然科学基金资助项目
