位相测量技术中系统参数的选择与测定

Parameter Selection and Test of PMP System in the Phase Measurement

位相测量轮廓术（PMP）是将被测物体表面投影光栅条纹的灰度分布变换为位相分布，从而求得被测物体高度分布的轮廓测量技术。本文讨论PMP测量系统参数：抽样间隔X、Y；光栅周期p、q；最大系统噪声nmax以及光瞳位置参数d、L的选择和测定。这些参数的合理选择与精确测定，将提高位相测量以及位相-高度转换的精度。

Phase Measuring Profilometry(PMP) is a 3-D surface auto-measurement tech-nique,which transter the intensity distribution on the surface of measured object created byprojected Ronch grating into a phase distribution in order to obtain the contour of measuredobject. The parameters of PMP measuring system, such as, sampling intervals X, Y, gratingperiods p. g,maximum system noise nmax,pupil positions d. L,are discussed in this paper. Thereasonable choice and precise testing of those parameters can improve the accuracy of mea-surement for phase and object contour.