摘要
在评述了研究表面粗糙度的重要性和紧迫性基础上,阐述了有关光学表面粗糙度概念的某些在介绍国外几家公司出售的几种典型表面粗糙度测试仪器技术特性的明了国内外这一领域研究的发展方向。最后概略地介绍了关于这一课题我们将要开展的部分工作。
Importances of developing optical surface roughness in many optical fields areemphasized in this artical. Some basic concept and specifications of noncontact surface profil-ers on several corporations are reviewed in detail. Development direction about surface rough-ness research and our next work is introduced in brief.
出处
《光学仪器》
1996年第2期35-41,共7页
Optical Instruments
关键词
表面粗糙度
轮廓仪
测试仪器
Surface Roughness, Profiler, Microsurface