量子电容谱测试系统研制

The Designation of Quantum Capacitance Spectrometer

采用差分电桥，超导磁体和双氦池等技术研制成功高灵敏的量子电容谱测试系统，系统灵敏度高达０．００１ＰＦ，系统信噪比在测试频率大于１００Ｈｚ、被测信号为１０ＰＦ时高达１５０。

By using the techniques of differential capacitance bridge,superconductor magnet and double helium pots, a quantum capacitance spectrometer with a high sensitivity up to 0. 001pF has been established. The SNR of the system reaches 150 at the frequencies larger than 100Hz as the measured capacitor is 10pF. A lot of measurements have been performed for different semiconductor devices.