微小型任意行程电磁冲击式纳米级步距驱动装置及其控制技术的研究

Research on the Superminiature.Arbitrary Stroke Electromagnetic Impulsive Typed Nano-meter Feed Drive Apparatus and the Control Technique

基于对置于平面上物体端面的轻轻敲击即能实现对物体位置精确调节的原理，研制出了小型任意行程电磁冲击式纳米级进给驱动装置、设计并组建了与之配套的驱动控制源和相应的检测系统。针对本项目研究的关键技术、即电磁冲击力的获取和控制，进行了一系列初步试验．试验结果表明：该微步距驱动装置的每一次冲击能将质量为０．３２５ｋｇ的物块移动约３９ｎｍ。

Based on the fact that the position of an object placed on a plane surface can be precisely adjusted by applying small impact to its ends,the paper develops the superminiature.arbitrary stroke electromagnetic impulsive typed nano-meter feed drive apparatus,the driving.controlling source and the testing system. According to the key technique of this research,that is how to get the electromagnetic impulsive force and controlled it effectively,in this paper,a series of preliminary tests is carried out,and through the experimental results,it is indicated that the apparatus can drive a mass of 0. 325kg moved above 39nm by one shot.