摘要
介绍了SOI技术的特点和制造方法、超薄SOI技术,应变硅SOI技术及其设备,如大束流专用氧离子注入机。
In this paper, the characteristics and manufacturing method of SOI technology, ultra-thin SOI technology, strained silicon SO1 technology and its equipment such as big beam flow private oxygen ion injecting equipment are introduced.
出处
《电子工业专用设备》
2006年第3期43-45,共3页
Equipment for Electronic Products Manufacturing
关键词
SOI技术
超薄SOI
应变硅SOI
大柬流
专用氧离子注入机
Silicon-on-Insulator technology
Ultra-thin-SOI
Strained silicon SOI
Big beam flow
Private oxygen ion injecting equipment
