摘要
MEMS并联开关是MEMS(微机电系统)的最重要的器件之一,由于其在高频状态下表现出的高隔离度及低插入损耗,以及与半导体开关相比所具有的极低的直流功耗,故在微波领域的应用越来越受到关注。本文着重分析了开关在开关时对传播的电磁信号的影响。文中给出了MEMS电容式并联开关在充放电时的电磁模型,描述了开关在充放电时的电磁场,分析了开关在充放电时产生的变化电磁场对信号的干扰情况。
As one of the most important MEMS（Micro-Electro-Mechanical systems） devices, a MEMS shunt switch has attracted more and more attention on its application in microwave field because of its excellent performance at high frequencies such as high isolation, low insertion loss, and lower dc power loss when being compared with semiconductor devices. This paper presents an analysis of electromagnetic interference for the shunt switch during swtiching. The electromagnetic models of the switch, the description of the electromagnetic fields caused by charging and discharging the switch and the interference of the varying electromagnetic fields to the signals are presented .
出处
《电子器件》
EI
CAS
2006年第1期76-78,81,共4页
Chinese Journal of Electron Devices
关键词
MEMS电容式并联开关
电磁干扰
充电
放电
电场强度
磁场强度
capacitive M-EMS shunt switch
electromagnetic interference
charging
discharging
electric field intensity
magnetic field intensity
