一维计量型微位移工作台的研究

A Statement Of One Dimension Micro-Displacement Stage

本文介绍了一种以衍射光栅作为计量标准器的垂直方向上的微位移工作台,用来实现在白光扫描干涉轮廓仪的表面形貌测量中Z方向上的精密定位,该工作台实现了轮廓仪的闭环测量和控制,文章重点讲述了光栅信号处理的硬件及软件细分技术,以及压电陶瓷驱动电路的原理和工作台闭环定位控制的流程。

This paper presents a Z direction micro-displacement platform with diffraction grating interference displacement sensor , the position accuracy is obtained in the Scanning White-light Interfeerometry profilometer.and a close-loop displacement measuring and control system is obtained.The main content is the counter and interpolation technique of grating signal managing with hardware and software methods .The flow of closed loop control system is described.