一种用于测量微观形貌的激光干涉式测量仪

A profilometer based on laser interferometry

该轮廓测量仪的开发是根据了Michelson干涉测量原理,工作台以正交衍射光栅为位移标准器,采用直线电机和压电陶瓷(PZT)进行快速粗定位和精确定位的两级定位过程．重点介绍了仪器的测量原理及光路系统,以及对电机及压电陶瓷的驱动和对干涉信号的处理。

The laser profilometer is based on the Michelson interfero metry principle. It＇s platform consists of coarse and fine stages, and the coarse stage is driven by a plane linear motor while the fine one by piezoelectric ceramics. The focus is on the measurement principle of the equipment and the of the motor and piezoelectric ceramics＇s driving.the technique of grating signal managing is presented.