5D. Zhu,NS, Qu,HS. Li,et al. Qian. Electrochemical micromachining of microstructures of micro hole and dimple array [J]. CIRP Annals - ManufacturingTechnology,2009,58(1): 177-180.
6Leng Y. Aplications of LIGA technology to precision manufacturing of high-aspect-ratio micro-components and systems:a review[J]. Microelectronics Journal, 2004,35 (2) : 131-143.