摘要
在工艺流程以及材料选择的基础上,用Coventorware和HFSS对间接加热终端式MEMS微波功率传感器进行了模拟与设计。模拟结果包括共面波导(CPW)与终端电阻上的温度分布,以及热电堆的接近对CPW性能的影响。确定了热偶对数为50,热电堆与CPW之间的距离为50μm,并选择了GaAs和Au作为热电偶的两臂,TaN作终端电阻。
Based on process and materials, the indirectly-heated terminating type MEMS microwave power sensor＇s structure was simulated and designed using Coventorware and HFSS. The temperature distribution on the coplanar waveguide（CPW） and the terminal resistors was simulated, and so did the impact of approach of the thermopile on the CPW. In the end, the design is specified, the number of the thermocouple is 50, and the distance between the CPW and the thermopile is 50 μm. GaAs and Au are chosen as hands of the thermopile, and TaN as the terminal resistor.
出处
《电子元件与材料》
CAS
CSCD
北大核心
2006年第4期50-52,56,共4页
Electronic Components And Materials
关键词
电子技术
共面波导
终端电阻
热电堆
MEMS
传感器
electronic technology
coplanar waveguide
terminal resistor
thermopile
MEMS
sensor
