摘要
ZnO∶A l(ZAO)透明导电薄膜是一种n型半导体,有高的载离子浓度和大的光学禁带宽度,具有优异的电学和光学性能,有极广的应用前景.着重分析了磁控溅射制备参数对光学性能的影响.
Transparent conductive ZnO: Al(ZAO) thin films are semi-conductor oxides with both high carrier concentration and large optical band gap. ZAO films have outstooding electrical and optical properties, and axe emerging as a most potential alternative candidate for transparent conducting material. The effect of growth parameters on the optical properties are mostly analysed.
出处
《云南民族大学学报(自然科学版)》
CAS
2006年第2期126-129,共4页
Journal of Yunnan Minzu University:Natural Sciences Edition
基金
重庆市教委基金项目(040810)
关键词
ZAO薄膜
光学性能
磁控溅射
ZAO films
optical properties
magnetron sputtering