大型非球曲面超精密复合加工机床

A Large-Scale Aspheric Surface Ultra-Precision Hybrid Machine Tool

详细介绍了“大型非球曲面超精密复合加工机床”．该机床具有磨削、铣削、车削等多种加工功能,采用了高精度的FANUC系统,在X横向导轨上设计了独特的卸荷系统,在Z垂直导轨上设计了精确的配重系统,主轴转速为150 r／min,可加工最大尺寸为φ1 200 mm的工件．用高精度的电感测微仪和自准直仪对机床进行了检测,结果表明:其数控系统位置及控制分辨率为0．05μm,主轴回转精度为26 nm．最后,用该机床进行了超精密加工试验,经检测,其加工工件的表面粗糙度Ra优于15 nm,实现了大型非球曲面的超精密加工．

A large-scale aspheric surface ultra-precision hybrid machine tool is developed, which has many functions such as grinding, milling and turning, etc. The machine tool is equipped with high-precision FANUC system. The particular unloading system designed for X cross guideway and accurate balance weight system designed for Z vertical gnideway, of which the rotational speed of spindle is 150 r/min and the maximum dimension that can be processed is φ1 200 ram. High-precision inductance amesdial and autocollimator are used to inspect the machine tool. The results show that the CNC position and control resolution is 0.05μm, the turning accuracy of spindle is 26 nm. Finally, ultra-precision processing experiments are carried out on the machine tool, and some workpieces with the surface roughness of less than 15 nm are obtained, which shows that the ultra-precision processing of large-scale aspheric surface is achieved.