基于CCD的微缝宽激光测量系统的改进

Amelioration and precision improving of slit width measurement system based on the orthogonal linear CCD

提出了以激光为光源的微缝宽度测量系统的新方法。从理论和实验上对几种影响激光衍射法测量微缝宽度的因素进行了研究,并以正交CCD组作为接收元件,改进了测量系统。与传统测量方法相比,不再有测量距离的不确定及CCD定位等问题。测量过程实现了非接触、高精度在线测量,系统性能稳定。

A new method of slit width measurement system is introduced,in which laser is used as light source.The impact factors of the system are studied in theory and experiment. Measurement system is improved by using the two linear CCD orthogonality as receiving element.Compared with the classical approach, there is no questions such as indeterminacy of measurement distance and orientation of CCD. Non-contact and high precision measurement are realized,and the system is steady.