高功率半导体激光器列阵光纤耦合模块

Fiber coupling module of the high output power

根据大功率半导体激光二极管列阵与光纤列阵耦合方式,分别从理论和实验两方面讨论、分析了大功率半导体激光二极管列阵与微球透镜光纤列阵耦合。将19根芯径均为200μm的光纤的端面分别熔融拉锥成具有相同直径的微球透镜,利用V形槽精密排列,排列周期等于激光二极管列阵各发光单元的周期。将微球透镜光纤列阵直接对准半导体激光二极管列阵的19个发光单元,精密调节两者之间的距离,使耦合输出功率达到最大。半导体激光二极管列阵与微球透镜光纤列阵直接耦合后,不仅从各个方向同时压缩了激光束的发散角,有效地实现了对激光束的整形、压缩,而且实现30 W的高输出功率,最大耦合效率大于80%,光纤的数值孔径为0.16。

A method using the coupling technique of the high power laser diode array and micro-lensed fiber array to achieve a very high output power is presented. Micro-lensed fiber array was made of 19 fibers with the same diameter of the fiber core of 200μm, and then the 19 fibers were fused to 19 micro-lenses. The 19 micro-lenses which had the same radius were fixed precisely by V-grooves. For the design of micro- lensed fiber array, the divergence of the laser beam from all directions was greatly reduced, and a very efficient laser beam shaper was achieved. Finally, high output power of 30 W of the coupled LDA was obtained, and the maximal coupling efficiency was more than 80% with the numeral aperture （NA） of 0.16.