一种产生多光束阵列的新型分束器

A New Splitter of Producing Multiple Beam Arrays

介绍一种产生多光束点阵的二元光学分束器。使用这种分束器时不需附加其它光学元件，便可直接产生会聚的多光束点阵。该元件是将有分束功能的Ｄａｍｍａｎｎ光栅和有透镜功能的Ｆｒｅｓｎｅｌ波带板集成，采用二元光学技术做成的位相型光学元件，具有衍射效率高、点阵清晰、光强分析均匀、相对误差小等优点。实验做出了９×９分束点阵，相对误差小于５％。

A binary phase beam splitter,which can produce a converging multiple beam array without using any other optical element,is introduced.It is an integrated element of beam splitting Dammann grating and beam focusing Fresnel zone plate with the application of binany optical technology.It has the advantages of high diffraction efficiency,little relative deviation of the intensity and forming clear and uniform array.A 9×9 split array is produced in the experiment with a relative deviation of the intensity less than 5%.