摘要
镀层内应力是影响镀层质量的重要因素,文中介绍了一种新型镀层内应力测量仪器,它能够连续测量镀层内应力,自动打印测量结果。
The internal stress of deposition is a important factor influencing quality of deposition.The article introduced a new type of measuring instrument of internal stress in deposition. The instrument can measure internal stress in deposition continuly,print measuring result automatically,and chart the curve of internal stress in deposition.
出处
《电子工艺技术》
1996年第5期24-27,共4页
Electronics Process Technology