聚碳酸脂镜片上沉积类金刚石薄膜耐磨性的研究

Wear Resistance of Diamond-like-carbon Films on the Polycarbonate Substrate

针对树脂镜片耐磨性较差的问题,在聚碳酸脂(PC)镜片上采用射频辉光放电等离子体(RF-PECVD)设备沉积类金刚石(DLC)薄膜来提高耐磨性,研究了沉积工艺条件对PC基体镀类金刚石(DLC)薄膜耐磨性的影响。摩擦磨损试验、显微硬度检测评价的结果表明:在PC镜片上沉积DLC薄膜后其耐磨性有很大提高,磨损率从12.5μg/m降低到5.7μg/m,摩擦系数由0.6降到0.22,硬度提高35.7%,并获得较佳的工艺参数。

Aiming at the poor wear resistance of polymer lenses, DLC film is deposited on the polycarbonate lens to improve the wear resistance by radio frequency plasma enhanced chemical vapor deposition（RFPECVD）. The effect of technological condition on the wear resistance is investigated. The means of frictional wear test, falling-sand test and micro hardness test are used to evaluate the properties of PC samples, then the result shows that the wear resistance of substrates improves well, the wear rates reduces from 12.5 to 5.71μg/m, and the friction coefficients declines from 0.6 to 0.2 after deposing DLC films on the substrates. It is also found that the hardness of samples enhances 35.7 percents. Moreover, the better technological parameters are obtained.