摘要
干涉计量技术由于能进行全场测量、非接触、精度和灵敏度高等特点在生产和研究中得到了广泛的应用。很多情况下,被测物理量和光学位相直接相关。本文从基本概念出发,介绍了光、光程、光程差和位相,对应用位相测量光学元件面形的原理做了详细的阐述,并简要列举了现在求取位相常用的方法:时间相移法、空间相移法、载波条纹的Fourier变换法和载波条纹的时域法。
Light, optical path, optical path difference, and phase and the principle to measure the surface of optical element based on phase are introduced. The methods to acquire phase are illustrated including Temporal phase-shifting method, Spatial phase-shifting method, Spatial carrier phase-shifting method and Fourier transform method.
出处
《物理测试》
CAS
2006年第2期35-38,共4页
Physics Examination and Testing
关键词
光程差
位相
干涉
相移
optical path difference
phase
interference
phase shift
