热氧化复合薄膜制备针叶状纳米ZnO

Growth of Acicular-Lobate-Like ZnO by Thermal Oxidation of Zn/SiO_2 Composite Films

采用射频磁控复合溅射技术,在Si(111)衬底上制备Zn/SiO2复合薄膜,本文讨论了不同退火时间下形成的晶状氧化锌,并对其进行了X射线衍射(XRD)、扫描电镜(SEM)、透射电镜(TEM)以及选区电子衍射(SAED)分析和表征。可以看出,由于不同材料的结晶温度不同,在空气中700℃退火热处理,使金属锌从复合薄膜中析出并氧化,形成针叶状氧化锌结晶体,ZnO晶体为六方纤锌矿结构。

Acicular-lobate-like ZnO crystal has been successfully grown by thermal oxidation of Zn/SiO2 composite films, prepared by RF magnetron co-sputtering and annealing at 700℃ in air on Si（ 111 ） substrates. ZnO films were characterized with X-ray diffraction （XRD）, scanning electron microscopy （SEM）, transmission electron microscopy （TEM） and selected area electron diffraction （SAED）. We found that Zn atom easily segregates to SiO2 surface and then is oxidized, and that the micmstructures of ZnO varies with annealing time. Possible mechanism was also tentatively discussed.