摘要
本文给出了InP材料(100)和(111)晶面的质谱分析结果,并且对(100)晶面做了光荧光分析。在室温和液氮条件下,测量了(100)晶面的电子浓度及电子迁移率。研究表明沾污主要来自硅。
In this paper, the physical properties of Indium phos-phide material are discussed. The mass spectrographic analysis results for crystal face (100) and (111) in the InP are given and Hall coefficient of the InP for face (100) is measured. And specifically the photoluminescence properties of Indium phosphide for crystal face (100) are investigated. Experimental results indicate that the contamination of silicon is predominant.
出处
《电子器件》
CAS
1996年第3期171-174,共4页
Chinese Journal of Electron Devices
关键词
质谱分析
光荧光
电子浓度
电子迁移率
磷化铟
mass spectrographic analysis, photoluminescence, electron concentration, electron mobility