大面积金属场致发射阴极阵列制造的新方法

A Novel Method for Fabricating Large Area Metal Field Emission Cathode Arrays

本文提出了以玻璃为基质，以厚感光有机膜为铸模，利用光刻法制作大面积金属场致发射阴极阵列的新方法。对该方法的工艺结果进行了计算机模拟并在现有条件下进行了初步的工艺探索，最后讨论了改进措施。

In this paper a novel method for fabricating large area metal field emission cathode arrays,in which flat glass is used as substrate and thick photosensitive organic film as mold,has been put forward.The result is simulated and the specific process is probed tentatively under our current conditions.Finally,the improvement of the process is discussed.