纳米致动器研究现状与工程应用的进展

Advances in Theoretical Study and Engineering Application of Nano-Actuators

纳米致动器是能够以0．1-100mm的步距驱动或移动被控对象的各种装置或器件．根据特征尺寸分为毫米尺度以上的宏机械纳米致动器、制作在芯片上的微米尺度纳米致动器及分子尺度的纳机械致动器，它们的共同特征是可以实现纳米级精度的机械驱动和定位．该文综述了纳米致动器国内外研究状况和主要研究成果，特别对近几年出现的典型的微机械纳米致动器的驱动机理进行了分析，讨论了纳米致动器在工程实际中的应用，指出了其发展的关键技术、存在问题及未来发展前景和趋势．

Nano-actuators are devices and structure that can be actuators are sorted into conventional dimension nano-actuators, actuated in the range of O. 1 - 100 nm. Nanomicro scale nano-actuators and nano-machine actuators. The same characteristic is the nano-scale precision of driving and positioning. Research status and main accomplishments of nano-actuators are summarized in detail. In particular, typical driving mechanisms of micro-scale nano-actuators appeared in the recent years are introduced. In addition, the key technology, existing problems and application prospect of nano-actuators are analyzed.