激光扫描粗糙度测量仪的研制

A Instrument on Surface Roughness Measurement with Laser Scanning

介绍激光扫描粗糙度测量仪的测量原理、结构及结果。本测量仪根据激光在工件表面的反射散射原理,应用激光扫描技术、数据采集、A/D转换和定标曲线的计算机拟合,整个测量过程在单板机控制下自动完成。测量粗糙度Ra的分辨率为0.001μm,测量重复精度为0.006μm。

By employing the principle of laser reflecting scattering from the surface of the work piece and the laser scanning technique allied with compu-tered data collection, A/D transition and calibration curve fitting, the instrument can measure the surface roughness automatically. The resolution and repro-ducibility of the roughness measurement are 0.001μm and 0.006μm respectively.