中频脉冲溅射制备绒面ZnO透明导电薄膜

Textured ZnO Transparent Conductive Thin Film Prepared by Mid-Frequency Magnetron Sputtering

采用中频脉冲磁控溅射系统制备高透过率、高电导率的平面ZnO薄膜。电阻率为5.57×10-4Ω·cm,载流子浓度2.2×1020cm-3,霍尔迁移率40.1cm2/V·s,可见光范围内(400～800nm)的平均透过率大于85%。用酸腐蚀的方法可以获得绒面效果。分析了气压和温度对绒面结构的影响,获得了适合薄膜太阳能电池要求的绒面ZnO透明导电薄膜。

The smooth ZnO film with high conductivity and high transmission was obtained by mid-frequency magnetron sputtering. The resistivity of the film is 5.57×10^-4Ω·cm, the carrier concentration is 2.2×10^20cm^-3 and the Hall mobility is 40.1 cm2/V-s. The avarage transmissivity is 〉85% within the visible range （400～800 nm） . The textured ZnO was gained by post-deposition chemical etching. The influence of sputtering pressure and sputtering temperature on the structure of textured ZnO was analyzed. The textured ZnO for thin film solar cells was obtained.