旋转载体用硅微机械陀螺的敏感元件

The Sense Organ of Silicon Micro-machined Gyroscope Using for Circumrotation Carrier

介绍了旋转载体用硅微机械陀螺的敏感原理,计算了硅振动单元振动摆角和敏感电容的关系。介绍了旋转载体用硅微机械陀螺敏感元件的结构和利用双面多次光刻、腐蚀等微机械工艺加工得到硅振动单元的工艺过程。对制作的4个敏感元件的电容进行静态测试,得到4个敏感元件各自电容的静态值,它们之间有所偏差。

The capacitance sense principle of silicon micro-machined gyroscope using for circumrotation carrier is introduced , the relationship between the sense capacitance and silicon element vibration angle is calculated. Using MEMS technics to process the silicon vibration element,in the process two side lithography and etching has being used many times. After testing the four sense organ＇s capacitance, the static capacitance has been gotten, but they are different with each other.