环境温度对微进给平台定位精度影响规律的研究

Study on the Rule of Influence of Ambient Temperature on the Positioning Precision of Micro Feed Table

微进给机构是超精密加工设备中实现精密定位的重要组成部分,加工环境条件极其微小的变化均可能影响其定位精度。文章运用I-DEAS软件,针对自行研制的一台精密磨削用多自由度辅助微进给平台,在假定其它加工环境均满足加工要求的前提下,对不同环境温度下其热变形情况进行了初步的研究。研究发现,微进给平台沿z向的最大变形量与环境温度呈正比;环境温度对微进给平台z向最大变形量的影响与微进给平台的动平台上表面温度值的大小呈正比。

Micro feed mechanism is the important part of equipment in ultra precise processing to realize precision position, even very small change of the environmental condition can influence it＇ s positioning accuracy. On the assumption that other processing environment satisfy the processing request, this paper use the software I-DEAS to make a pilot study on the thermal deformation of a precision grinding auxiliary micro feed table under different ambient temperature. Through the study we find the micro feed table＇ s maximal deformation in z direction is linear with ambient temperature and the influence of ambient temperature on the micro feed table＇ s maximal deformation in z direction is linear with temperature on the moving part.