纳米硬度实验有限元数值模拟

Numerical Simulation of Nanohardness Experiments

使用FEPG(F in ite E lem ent Program Generator)软件编程,对维氏压头的微硬度实验进行模拟,建立了一种针对膜基体系有限元计算的新模型,该模型考虑了边界摩擦和实时跟踪接触因素,在对S i片和TiN单层膜压痕的模拟分析后,得出“载荷-压痕对角线关系曲线”,与其它文献中的实验结果相吻合。说明模型是合理的,结果是可靠的,对实际应用具有指导意义,并为理论分析提供了研究方法。

By applying FEPG software to program and simulate the nanohardness experiments with Vickers indenter, a new model for finite element calculation of the film-substrate system was founded. The factors of the friction on the contact boundary and real-time tracking were considered in the model. By simulating and analyzing indentation process of Si sheet and TiN single film, the curve on indentation diagonals was drawn. The results of computation model agreed with the data of the nanohardness experiment in the literature. It is indicated the model is reasonable, which provides a direction to practical application and a research method to theoretical analysis.