摘要
采用磁控溅射制备的合金表面膜层具有防腐蚀性能优异、耐磨性强等优点,其作为镁合金表面处理技术具有良好的发展趋势。简要介绍了磁控溅射的基本原理及其在镁合金表面处理中的一些应用,并着重给出了反应磁控溅射“Berg”模型的简化计算方法,最后对国内外磁控溅射的最新技术以及应用于镁合金表面处理的趋势进行了展望。
The coatings deposited by magnetron sputtering technology have good corrosion and wear resistance. This technique shows optimistic development trend in the field of magnesium alloys surface treatment. The basic principle of magnetron sputtering technology and its recent application in magnesium alloys surface treatment are briefly reviewed. Especially, the simplified calculation of ＂Berg＇s model＂ is introduced. Finally, a prospect for the new technique and trend of magnetron sputtering on magnesium alloys surface treatment is also given.
出处
《铸造技术》
EI
CAS
北大核心
2006年第4期412-415,共4页
Foundry Technology
关键词
磁控溅射
镁合金
表面处理
Magnetron sputtering
Magnesium alloys
Surface treatment
