摘要
为在金属中形成所需要的合金或金属间化合物而采用双重离子注入技术.2种注入离子注入能量和注量需要合理匹配.还考虑了溅射效应和扩散效应存在时的各种修正.在计算机模拟的基础上,对 Ti^++N^+双注入 H13钢中 Fe_2Ti,TiN 和 Fe_2N 等化合物进行了测量.这些合金相和金属间化合物的形成提高了钢表面抗磨损特性.还讨论了双注入金属表面的硬化机理.
In order to obtaine the alloy and intermetallics,the double ion implantation technique is studied.Suitable matching condition of ion energy and dose is searched.The corrections of sputtering and diffusion for ion concentration profile are considered.According to results of computer simulation,the alloys and intermetallics of Fe_2Ti,TiN and Fe_2N in double ion implanted H13 steel are measured.The wear-resistance of steel surface is improved by double Ti^+ N^+ implantation.Finally,the surface strengthen- ing mechanism by double ion implantation is discussed.
出处
《北京师范大学学报（自然科学版）》
CAS
CSCD
1990年第4期53-58,共6页
Journal of Beijing Normal University(Natural Science)
基金
"八六三"高科技研究资助项目
关键词
离子注入
双注入
Ti^+
N^+
合金相
Ti+N double implantation, computer simulation, matching of ion implantation conditions, alloy, improvement resistance wear
