超声喷雾热解法制备ZnO薄膜及性能研究

Characteristics of ZnO films prepared by ultrasonic spray pyrolysis method

以醋酸锌水溶液为前驱体溶液，使用自制的超声喷雾热解系统在玻璃基板上制备得到了ZnO薄膜。经X射线衍射（XRD），扫描电镜（SEM）分析得到ZnO薄膜的晶体结构和微观形貌。测试结果表明，ZnO薄膜为六角纤锌矿结构，在450～500℃下制备的薄膜显示出良好的结晶性能，并且沿（002）晶面择优取向生长，薄膜具有优良的均匀性和致密性。同时，制备得到的薄膜在可见光区也表现出80％以上的高透过率。

ZnO thin films were grown on the heated glass substrate by the ultrasonic spray pyrolysis method ,zinc acetate solutions were used as the precursor material. The X-ray diffraction（XRD） and scanning electron microscopy（SEM） were employed to analyze the crystalline and microstructure of the thin films. The results show that the ZnO thin films exhibit the hexagonal wurtzite polycrystalline structure. Samples that grown in the range of 450-500℃ have the dense smooth and homogenous structure and exhibit the preferential orientation of （002） to the substrate surface. All the films have a high visible transmittance of above 80%.