摘要
以醋酸锌水溶液为前驱体溶液,使用自制的超声喷雾热解系统在玻璃基板上制备得到了ZnO薄膜。经X射线衍射(XRD),扫描电镜(SEM)分析得到ZnO薄膜的晶体结构和微观形貌。测试结果表明,ZnO薄膜为六角纤锌矿结构,在450~500℃下制备的薄膜显示出良好的结晶性能,并且沿(002)晶面择优取向生长,薄膜具有优良的均匀性和致密性。同时,制备得到的薄膜在可见光区也表现出80%以上的高透过率。
ZnO thin films were grown on the heated glass substrate by the ultrasonic spray pyrolysis method ,zinc acetate solutions were used as the precursor material. The X-ray diffraction(XRD) and scanning electron microscopy(SEM) were employed to analyze the crystalline and microstructure of the thin films. The results show that the ZnO thin films exhibit the hexagonal wurtzite polycrystalline structure. Samples that grown in the range of 450-500℃ have the dense smooth and homogenous structure and exhibit the preferential orientation of (002) to the substrate surface. All the films have a high visible transmittance of above 80%.
出处
《功能材料》
EI
CAS
CSCD
北大核心
2006年第4期576-579,共4页
Journal of Functional Materials
基金
国家高技术研究发展计划(863计划)资助项目(2001AA320202)
关键词
ZNO
超声喷雾热解法
取向生长
XRD
ZnO
ultrasonic spray pyrolysis (USP)
preferential orientation
XRD