一种沟槽结构四臂压电式加速度计的仿真设计

Design and simulation of four-beam piezoelectric accelerometer with slot substrate

介绍了现有四臂压电式加速度计的工作原理及ANSYS软件在压电式加速度计方面的应用。将传统的四臂压电式加速度的悬臂梁改用沟槽式结构。并使用ANSYS软件进行仿真分析,发现沟槽结构的加速度计的灵敏度可以高达0.633 5mV/gn,远高于平坦基体表面结构式加速度计的灵敏度(0.281 95mV/gn)。

Working principle of four-beam piezoelectric accelerometer and application of ANSYS on piezoelectric accelcrometer are addressed. Cantilever of traditional accelerometer is improved by using castellated surface instead of smooth surface. The result of ANSYS simulation of the two configurations shows novel method can greatly amplify the sensitivity of accelerometer to 0.633 5 mV/gn instead of former 0. 28195 mV/gn.